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nano6 时间:2021-01-17 阅读:()
1ConsultativeCommitteeforLength(CCL)ReporttoCGPMPresident:AttilioSacconiExecutiveSecretary:LennartRobertsson20October2011224CCLmembersNIST,USANMIA,AustraliaNMIJ,JapanNMISA,SouthAfricaNIM,ChinaUME,TurkeyNPL,UnitedKingdomNRC-INMS,CanadaPTB,GermanySMU,SlovakiaVSL,NetherlandsVNIIM,Russia2newmembersNewofficialobserver:IPQ,Portugal.
A*STAR,SingaporeBEV,AustriaCEM,SpainCENAM,MexicoCMI,CzechRepublicLNE,FranceINMETRO,BrasilINRIM,ItalyJILA,USAKRISS,KoreaMETAS,SwitzerlandMIKES,Finland3CCLworkinggroupstructureFollowingtherecommendationofCIPM,CCLadoptedin2009anewworkinggroupstructure:4CCLworkinggroupstructureWG-MRA,includingsubworkinggroupsandtaskgroupTasksoftheformerWGDMCoordinatingKCServicecategoriesComplianceofCMCswithKCresultsAssuringthelinkingofKC5CCLworkinggroupstructureWG-NDimensionalnanometrologyTasksoftheformerdiscussiongroupDG-76CCLworkinggroupstructureWG-SStrategicplanningObserveimplementationofthenewstructureAddresslong-termR&DactivitiesinLengthProposelong-termplansforCCLactivities7CCLworkinggroupstructureWGFSFrequencystandardsJointworkinggroupwithCCTF8MeetingssincelastCGPM2007WGDM24–25September2008,INRIM,TorinoFSWG(jointWGofCCTFandCCL),Sèvres,2June2009WGDM8–9June2009,BIPMCCL10–11June2009(14thCCLmeeting)WG-S9June2010,A*STAR,SingaporeWG-MRA10–11June2010,A*STAR,Singapore(includingTG-Linkinganddiscussiongroups)WG-N10June2010,A*STAR,SingaporeWG-MRA6–7October2011,METAS,Wabern.
9CCLKeycomparisonsThefirstroundofCCLkeycomparisonsiscompleted:K1ShortgaugeblocksResultsonKCDBK2LonggaugeblocksResultsonKCDBK3AngleResultsonKCDBK4Cylindricaldiam.
standardsResultsonKCDBK5StepgaugeResultsonKCDBK6BallplateResultsonKCDBK7LinescalesResultsonKCDB*K8SurfacetexturestandardsResultsonKCDB*K11MePlasersResultsonKCDB***ConductedasCCL-RMOcomparisons,stillpartlyrunning**On-goingKC(formerBIPMcomparison).
10CCLKeycomparisonsThefirstroundofCCLkeycomparisonsiscompleted:K1ShortgaugeblocksResultsonKCDBK2LonggaugeblocksResultsonKCDBK3AngleResultsonKCDBK4Cylindricaldiam.
standardsResultsonKCDBK5StepgaugeResultsonKCDBK6BallplateResultsonKCDBK7LinescalesResultsonKCDB*K8SurfacetexturestandardsResultsonKCDB*K11MePlasersResultsonKCDB**ShallbecombinedtoCCL-K1Shallbeabandoned;DG6isinvestigatingnewwaystovalidatethecoordinatemetrologyCMCs11RMOKeycomparisonsThefirstroundofRMOkeycomparisonsiscompleted:K1ShortgaugeblocksResultsonKCDBK2LonggaugeblocksResultsonKCDBK3AngleResultsonKCDBK4Cylindricaldiam.
standardsResultsonKCDBK5StepgaugeResultsonKCDBK6BallplateResultsonKCDBK7LinescalesResultsonKCDB*K8SurfacetexturestandardsResultsonKCDB*12CCL-RMOkeycomparisonIfappropriate,alternativescheme:CCL-RMOkeycomparisons*TheCCL-RMOschemeisessentiallyequivalenttotheclassical"scheme:Fromthecommonlyparticipatinglabs,avirtualCCL-KC"maybeformedCCL-RMOcomparisonsarelinked*TheCCL-RMOcomparisonscheme,CCL/WGDM/09-22SuccessfullyappliedforEURAMET.
L-K4andEURAMET.
L-K7132ndroundofkeycomparisonsCurrently,CCLisrunningthe2ndroundofkeycomparisons:CCL-K1.
2011,GaugeblocksrunningEURAMET.
L-K3,AnglerunningasCCL-RMO-KC.
14ProblemswithkeycomparisonsFindingpilotlaboratoriesfor2ndroundFindingcomparisonstandards(cost!
)DelayedreportsMonitoringtheprogressofKCMonitoringCMCclaimsversusKCresultsMonitoringcorrectiveactions15Theproblemsareaddressed!
WG-MRAdevelopednewtoolformonitoringtheprogressExecutivereportsGuidancedocument*sWG-CMC*CCLWG-MRA-GD1,RunningofMRAcomparisonsinlengthmetrologyandmonitoringtheirimpactonCMCsNosolution!
Findingpilotlaboratoriesfor2ndroundFindingcomparisonstandards(cost!
)DelayedreportsMonitoringtheprogressofKCMonitoringCMCclaimsversusKCresultsMonitoringcorrectiveactions16WG-NDimensionalnanometrologyNano1linewidth(CDmask)Nano2stepheightsNano3linescalesNano41DgratingsNano52DgratingsNano6linewidth(SingleCrystalCD)inprogresscompletedcompletedcompletedcompletedinprogressPilotStudyArtefactsStatus6pilotstudiessuccessfullyoperatedResultspublishedinKCDBasCCLsupplementarycomparisonsEstablishingtraceabilityinnanometrologyFuturepossibilities:AtomicscalestepheightsSub-nanometersurfaceroughnessNanoparticlemeasurementsDeepsub-micrometerpitch.
17ChallengesinLengthMetrologyLongdistanceinterferometryandrangefinding(includingfsfrequencycombapplications)MetrologyoflargestructuresinproductionengineeringMulti-sensor(tactile,optical)coordinatemetrologyMicrox-raycomputedtomographyMicrocoordinatemetrologyformicropartsMetrologyoffunctionalstructuredsurfaces(includingarealsurfacetexture)3DmetrologyatthenanoscaleMetrologyofnanoparticlesHighresolutioninterferometryatsubnanometreaccuracy.
Fromkilometrestonanometres18Longdistanceinterferometryusingfsfrequencycombs30cmEMRP-ProjectLongdistance"www.
longdistanceproject.
euTimeofflightdistancemeasurementbasedonfslaser19MetrologyoflargestructuresPTB,EMRP-ProjectNIMTech"www.
euramet.
org/index.
phpid=nimtecLasertracerassistedcoordinatemetrology20MetrologyofnanoparticlesMETASEMRP-ProjectNanoparticles"NanoparticlesmeasuredwithmetrologyAFM21HighresolutioninterferometryatsubnanometreaccuracyINRIM,EMRP-ProjectNanotrace"www.
nanotrace.
itCOXI(x-rayinterferometer)andhighaccuracytransferstandardforinterferometercomparisonatpmresolution.
22Thankyouforyourattention!
A*STAR,SingaporeBEV,AustriaCEM,SpainCENAM,MexicoCMI,CzechRepublicLNE,FranceINMETRO,BrasilINRIM,ItalyJILA,USAKRISS,KoreaMETAS,SwitzerlandMIKES,Finland3CCLworkinggroupstructureFollowingtherecommendationofCIPM,CCLadoptedin2009anewworkinggroupstructure:4CCLworkinggroupstructureWG-MRA,includingsubworkinggroupsandtaskgroupTasksoftheformerWGDMCoordinatingKCServicecategoriesComplianceofCMCswithKCresultsAssuringthelinkingofKC5CCLworkinggroupstructureWG-NDimensionalnanometrologyTasksoftheformerdiscussiongroupDG-76CCLworkinggroupstructureWG-SStrategicplanningObserveimplementationofthenewstructureAddresslong-termR&DactivitiesinLengthProposelong-termplansforCCLactivities7CCLworkinggroupstructureWGFSFrequencystandardsJointworkinggroupwithCCTF8MeetingssincelastCGPM2007WGDM24–25September2008,INRIM,TorinoFSWG(jointWGofCCTFandCCL),Sèvres,2June2009WGDM8–9June2009,BIPMCCL10–11June2009(14thCCLmeeting)WG-S9June2010,A*STAR,SingaporeWG-MRA10–11June2010,A*STAR,Singapore(includingTG-Linkinganddiscussiongroups)WG-N10June2010,A*STAR,SingaporeWG-MRA6–7October2011,METAS,Wabern.
9CCLKeycomparisonsThefirstroundofCCLkeycomparisonsiscompleted:K1ShortgaugeblocksResultsonKCDBK2LonggaugeblocksResultsonKCDBK3AngleResultsonKCDBK4Cylindricaldiam.
standardsResultsonKCDBK5StepgaugeResultsonKCDBK6BallplateResultsonKCDBK7LinescalesResultsonKCDB*K8SurfacetexturestandardsResultsonKCDB*K11MePlasersResultsonKCDB***ConductedasCCL-RMOcomparisons,stillpartlyrunning**On-goingKC(formerBIPMcomparison).
10CCLKeycomparisonsThefirstroundofCCLkeycomparisonsiscompleted:K1ShortgaugeblocksResultsonKCDBK2LonggaugeblocksResultsonKCDBK3AngleResultsonKCDBK4Cylindricaldiam.
standardsResultsonKCDBK5StepgaugeResultsonKCDBK6BallplateResultsonKCDBK7LinescalesResultsonKCDB*K8SurfacetexturestandardsResultsonKCDB*K11MePlasersResultsonKCDB**ShallbecombinedtoCCL-K1Shallbeabandoned;DG6isinvestigatingnewwaystovalidatethecoordinatemetrologyCMCs11RMOKeycomparisonsThefirstroundofRMOkeycomparisonsiscompleted:K1ShortgaugeblocksResultsonKCDBK2LonggaugeblocksResultsonKCDBK3AngleResultsonKCDBK4Cylindricaldiam.
standardsResultsonKCDBK5StepgaugeResultsonKCDBK6BallplateResultsonKCDBK7LinescalesResultsonKCDB*K8SurfacetexturestandardsResultsonKCDB*12CCL-RMOkeycomparisonIfappropriate,alternativescheme:CCL-RMOkeycomparisons*TheCCL-RMOschemeisessentiallyequivalenttotheclassical"scheme:Fromthecommonlyparticipatinglabs,avirtualCCL-KC"maybeformedCCL-RMOcomparisonsarelinked*TheCCL-RMOcomparisonscheme,CCL/WGDM/09-22SuccessfullyappliedforEURAMET.
L-K4andEURAMET.
L-K7132ndroundofkeycomparisonsCurrently,CCLisrunningthe2ndroundofkeycomparisons:CCL-K1.
2011,GaugeblocksrunningEURAMET.
L-K3,AnglerunningasCCL-RMO-KC.
14ProblemswithkeycomparisonsFindingpilotlaboratoriesfor2ndroundFindingcomparisonstandards(cost!
)DelayedreportsMonitoringtheprogressofKCMonitoringCMCclaimsversusKCresultsMonitoringcorrectiveactions15Theproblemsareaddressed!
WG-MRAdevelopednewtoolformonitoringtheprogressExecutivereportsGuidancedocument*sWG-CMC*CCLWG-MRA-GD1,RunningofMRAcomparisonsinlengthmetrologyandmonitoringtheirimpactonCMCsNosolution!
Findingpilotlaboratoriesfor2ndroundFindingcomparisonstandards(cost!
)DelayedreportsMonitoringtheprogressofKCMonitoringCMCclaimsversusKCresultsMonitoringcorrectiveactions16WG-NDimensionalnanometrologyNano1linewidth(CDmask)Nano2stepheightsNano3linescalesNano41DgratingsNano52DgratingsNano6linewidth(SingleCrystalCD)inprogresscompletedcompletedcompletedcompletedinprogressPilotStudyArtefactsStatus6pilotstudiessuccessfullyoperatedResultspublishedinKCDBasCCLsupplementarycomparisonsEstablishingtraceabilityinnanometrologyFuturepossibilities:AtomicscalestepheightsSub-nanometersurfaceroughnessNanoparticlemeasurementsDeepsub-micrometerpitch.
17ChallengesinLengthMetrologyLongdistanceinterferometryandrangefinding(includingfsfrequencycombapplications)MetrologyoflargestructuresinproductionengineeringMulti-sensor(tactile,optical)coordinatemetrologyMicrox-raycomputedtomographyMicrocoordinatemetrologyformicropartsMetrologyoffunctionalstructuredsurfaces(includingarealsurfacetexture)3DmetrologyatthenanoscaleMetrologyofnanoparticlesHighresolutioninterferometryatsubnanometreaccuracy.
Fromkilometrestonanometres18Longdistanceinterferometryusingfsfrequencycombs30cmEMRP-ProjectLongdistance"www.
longdistanceproject.
euTimeofflightdistancemeasurementbasedonfslaser19MetrologyoflargestructuresPTB,EMRP-ProjectNIMTech"www.
euramet.
org/index.
phpid=nimtecLasertracerassistedcoordinatemetrology20MetrologyofnanoparticlesMETASEMRP-ProjectNanoparticles"NanoparticlesmeasuredwithmetrologyAFM21HighresolutioninterferometryatsubnanometreaccuracyINRIM,EMRP-ProjectNanotrace"www.
nanotrace.
itCOXI(x-rayinterferometer)andhighaccuracytransferstandardforinterferometercomparisonatpmresolution.
22Thankyouforyourattention!
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